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008 000203s2000 nyua b 001 0 eng
020 _a0071356363
040 _aBD-DhIU
_cBD-DhIU
042 _apcc
082 0 0 _a537.6223
_222
_bZAM
100 1 _aVan Zant, Peter.
245 1 0 _aMicrochip fabrication:
_ba practical guide to semiconductor processing /
_cPeter Van Zant.
250 _a4th ed.
260 _aNew York:
_bMcGraw-Hill,
_cc2000.
300 _axvi, 632p.:
_bill.;, figs.;, tables.;
_c23 cm.
365 _b230
_cBDT.
500 _aIncludes index.
504 _aIncludes bibliographical references and index.
521 _aDept. of EEE
650 0 _aSemiconductors
_xDesign and construction.
650 0 _aIntegrated circuits
_xDesign and construction.
856 4 2 _uhttp://www.loc.gov/catdir/bios/mh041/00023171.html
856 4 2 _uhttp://www.loc.gov/catdir/description/mh021/00023171.html
856 4 1 _uhttp://www.loc.gov/catdir/toc/mh021/00023171.html
856 4 2 _3Contributor biographical information
856 4 2 _3Publisher description
856 4 1 _3Table of contents
906 _a7
_bcbc
_corignew
_d1
_eocip
_f20
_gy-gencatlg
942 _cBK
999 _c845
_d845